| http://www.w3.org/ns/prov#value | - ulating film and the upper protection insulating film, it is difficult for the reducing substance such as the hydrogen to enter into the capacitor dielectric film. [0246] Besides, where the capacitor is formed in plural, if the total film thickness of the first capacitor protection insulating film and the second capacitor protection insulating film is set smaller than half of the minimum interval
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