| http://www.w3.org/ns/prov#value | - Further, the first rotation axis driving unit 46, each pulley such as the leading end pulley 62, the timing belt, the rotation axis, and the like, correspond to a first advancement/retraction driving unit for advancing and retracting the first substrate supporting unit 43 of the first multi-joint arm 3A. On the other hand, the second rotation axis driving unit 56, each pulley such as the base pull
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