| http://www.w3.org/ns/prov#value | - Further, the fixing portion, the movable portion, and the thin plate portion of the present device are integrally structured by sintering, and the piezoelectric/electrostrictive element is integrally structured by sintering with the thin plate portion, fixing portion and/or the movable portion by the film forming methods without using an adhesive, and therefore, the device is a structure which doe
|