| http://www.w3.org/ns/prov#value | - Furthermore, recently films with high hardness consisting of carbon, or comprising carbon as a main component, which are referred to as, for instance, a-C:H film, an amorphous carbon film or non-crystalline carbon film, or a diamond-like carbon film are produced by the plasma CVD method, the photo CVD method, a sputtering method, or the like, and the utilization of such films as a protective layer
|
