| http://www.w3.org/ns/prov#value | - Furthermore, the stage unit is unaffected by heat generated by driving of the drive device. [0024] An exposure apparatus according to another aspect of the present invention is an exposure apparatus in which a pattern of a mask held by a mask stage is exposed by a projection optical system onto a photosensitive substrate held on a substrate stage, wherein at least one of the mask stage, the projec
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