| http://www.w3.org/ns/prov#value | - Further, the treatment temperature may be set to a room temperature (typically 20 to 27??? C.). [0219] Note that halogen fluoride is the substance represented by a chemical formula XFn (X denotes halogen except for fluorine, and n is an integer), and chlorine fluoride (ClF), chlorine trifluoride (ClF3), bromine fluoride (BrF), bromine trifluoride (BrF3), iodine fluoride (IF) or iodine trifluoride
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