| http://www.w3.org/ns/prov#value | - Purifying theinterface at which the active layer and other insulating film are brought into contact is therefore necessary to obtain good TFT characteristics.SUMMARY OF THE INVENTIONThe present invention discloses a technique required for purifying the interface between an active layer and an insulating film, and an object of the present invention is to utilize such a technique to form a TFT exhib
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