| http://www.w3.org/ns/prov#value | - Furthermore, the film in which a fine pattern is formed may be made of tungsten, tantalum, molybdenum, zirconium, titanium, hafnium, chromium, platinum, iron, zinc, tin, a silicide of any of these substances, a nitride of any of these substances or a carbide of any of these substances; aluminum, copper, gold, silver or an alloy which is mainly composed of any of these metals; or an organic polymer
|
