| http://www.w3.org/ns/prov#value | - ularly preferably four or more groups. [0067] The polar group is not particularly limited, and any polar group can be properly selected according to purposes, including hydroxyl group, carboxyl group, carbonyl group, sulfonyl group and the like. [0068] The content of the water-soluble aromatic compound in the resist pattern thickening material may be properly determined according to purposes altho
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