| http://www.w3.org/ns/prov#value | - Further, when a film is to be formed by chemical vapor deposition on the inner surface of the container, it is desired that the treatment gas introduction pipe is made of a porous material such as a porous metal, ceramics or plastics from the standpoint of forming a chemically deposited film featuring homogeneity, small thickness, softness, flexibility and excellent gas shut-off property while enh
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