About: http://webisa.webdatacommons.org/332216197

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, as illustrated in FIG. 1, the unit substrate 230 can be formed of a ceramic material, such as AlTiC (Al2O3???TiC), SiO2 or the like, and is preferably formed of a semiconductor material, such as Si, GaAs, SiC or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com