| http://www.w3.org/ns/prov#value | - Further, the resonator structure includes, on a substrate 1301 made of an insulator such as glass, quartz or ceramics, a reference electrode 1303, a supporting portion 1304 conductively connected to the reference electrode 1303, a vibration body 1305 conductively connected to and supported by the supporting portion 1304, and a pair of excitation electrodes 1307 and 1307 which are arranged opposite
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