| http://www.w3.org/ns/prov#value | - 23 Aug 200425 Apr 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS705993623 Mar 200413 Jun 2006Cabot Microelectronics CorporationLow surface energy CMP padUS707411416 Jan 200311 Jul 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishi
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