About: http://webisa.webdatacommons.org/332264865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, after the metal layer other than a portion working as the gate electrode 4 is removed through plasma etching, the photoresist is removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com