| http://www.w3.org/ns/prov#value | - Further examples of contact dielectric materials include conventional oxides, nitrides, oxynitrides, and other dielectrics, such as spin-on glass (SOG), P-doped silicon oxide (P-glass), silicon nitride (SixNy), silicon oxynitride (e.g., of the general formula SiaOxNy such that (x/2)+(3y/4)=a), Al2O3, metal nitrides such as aluminum nitride (e.g. AlN), V2O5, tetraethylorthosilicate-based oxides, ti
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