| http://www.w3.org/ns/prov#value | - Suitable examples of theseal gases include inert gases such as argon and helium, and hydrogen and nitrogen.To obtain an enhanced effect of the seal gas, it is a preferred embodiment that the seal gas is appropriately mixed with a gas capable of etching the silicon, for example hydrogen chloride.FIG. 20 is a schematic sectional view of a silicon production reaction apparatus for use in the inventio
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