| http://www.w3.org/ns/prov#value | - *Jun 28, 1993Jun 21, 1994Canon Kabushiki KaishaFocusing methodUS5602400 *Apr 23, 1996Feb 11, 1997Canon Kabushiki KaishaSurface position detecting method and apparatus including detection and correction of errors, such as surface position errors or tilt, in exposure regionsUS5864433 *Jul 8, 1997Jan 26, 1999Canon Kabushiki KaishaAstigmatism-correcting optical system, projection exposure apparatus us
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