| http://www.w3.org/ns/prov#value | - Further, because the metal diaphragm is used repeatedly at a high frequency as an open/close valve for corrosive gas, the metal diaphragm is required to have durability under such a severe use environment.In order to satisfy such requirements, a metal diaphragm or diaphragm valve excellent in characteristics such as corrosion resistance and durability has been developed actively (see, for example,
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