About: http://webisa.webdatacommons.org/332465935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, at step 120, the temperature of wafer 10 is adjusted to a first temperature, such as a temperature suitable for epitaxial silicon growth.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com