| http://www.w3.org/ns/prov#value | - uum vessel 1 and the vessel 21 to a desired vacuum degree, the reaction gas inlets 12, 13 for supplying the reaction gas into the vacuum vessel 1, a magnetic shielding means such as the magnetic shielding plate 16, etc., which are provided at the outer side of the magnetic field generation coils 6, 7, and a microwave shielding means comprising the microwave shielding net 14 which passes the gas bu
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