About: http://webisa.webdatacommons.org/332738623

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Planarization is a method of treating a surface to remove discontinuities, such as by polishing (or etching), thereby ???planarizing??? the surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com