About: http://webisa.webdatacommons.org/333056544

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Generally, however, the functional layer 14 comprises various layers of silicon dioxide, polysilicon (in which semiconductor devices may be formed by doping) and protective layers such as made of tantalum or polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com