About: http://webisa.webdatacommons.org/333205173

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1, a system 10 generally made in accordance with the present invention for determining and controlling the temperature of a wafer made from a semi-conductive material, such as silicon, is illustrated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com