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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, improvement of technique for cleaning precision substrates is an essential factor for improving the quality and yield of advanced devices in their future manufacture.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com