About: http://webisa.webdatacommons.org/333407089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a clear need for a method of sealing a cavity which is compatible with standard CMOS processes and which does not rely on getter materials or reactive gases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com