About: http://webisa.webdatacommons.org/333758141

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, the surface over which the plurality of transistors 54 is not formed, of the ground substrate 50 is polished by using a polishing apparatus (e.g., a polishing pad or a polishing abrasive grain such as cerium oxide or the like).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com