About: http://webisa.webdatacommons.org/33408606

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First isolation window 406 may comprise a material or materials that do not react appreciably with the types of gases that are expected to be introduced into chamber 410.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com