About: http://webisa.webdatacommons.org/334211391

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11, extending over four pages, is a flow chart indicating the operation of the system of FIGS. 9 and 10 as a wafer travels from the second processing station to the second buffer station and then to the third processing station.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com