About: http://webisa.webdatacommons.org/334231913

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Second interlayer insulating film 20a preferably has a film thickness from about 5000 ??? to about 8000 ???, and may be made of material such as BPSG.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com