About: http://webisa.webdatacommons.org/334494810

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Many epitaxial deposition processes employ a so-called ???bake??? step in which the substrate is heated to drive off surface contaminants such as oxygen and carbon immediately prior to epitaxial deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es