| http://www.w3.org/ns/prov#value | - Referring to FIG. 2H, a phase change material layer is formed on the carbon nano tube lower electrode 130 and the second insulating interlayer 120 in such a manner so as to fill the upper-end portion of the second contact hole H2, and an electrically conductive layer for an upper electrode is formed on the phase change material layer.
|
