About: http://webisa.webdatacommons.org/335159774

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sematech and its members, such as IBM, Intel, Samsung and TSMC, will foot some of the bill but are betting on metrology tool makers to share the cost and build the tools.
http://www.w3.org/ns/prov#wasQuotedFrom	eetimes.com