About: http://webisa.webdatacommons.org/335280723

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, in FIG. 27C, a seed layer 121 is formed on the bottom surface of the silicon substrate 11 on which the resin layer 401 is formed, using such as a sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com