About: http://webisa.webdatacommons.org/335481658

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A sixth perspective of the present invention is a method for manufacturing a table having a polishing surface for polishing a semiconductor wafer held by a wafer holding plate of a wafer polishing apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com