About: http://webisa.webdatacommons.org/335483014

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	20080295872SUBSTRATE CLEANING CHAMBER AND COMPONENTS - A substrate cleaning chamber comprises various components, such as for example, a consumable ceramic liner, substrate heating pedestal, and process kit.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org