| http://www.w3.org/ns/prov#value | - As means for efficiently performing hydrogenation, plasma hydrogenation (using hydrogen excited by plasma) may be performed before forming the first layer 1832 of the second insulating layer. [0132] A second layer 1833 of the second insulating layers shown in FIG. 20A is formed from an organic insulating material such as polyimide or acrylic to level the surface thereof.
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