About: http://webisa.webdatacommons.org/335494023

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As mentioned above, control of the gap between the polymer film and the mask is a critical feature of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com