About: http://webisa.webdatacommons.org/335522772

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Usually they are refractory metals, such as Ta, W and Mo, or refractory metal nitride thin films such as TiN, TaN, and WxNy.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com