| http://www.w3.org/ns/prov#value | - Further, the main controller 50 stores previously in its memory, in a form of a mathematical equation or a table, a practical focal depth determined depending on the illuminating conditions, the type or the preciseness of the reticle patterns to calculate focal depths ZDa and ZDb for the pattern areas PA1 and PA2, respectively, in a similar manner as for the focusing positions.
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