About: http://webisa.webdatacommons.org/335715577

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During the process of depositing a layer of a material, such as silicon, on the surface of the wafer 30, molecules containing the material, typically silane for silicon, diffuse to the back surface of the wafer 30.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com