About: http://webisa.webdatacommons.org/336214491

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a flow chart of a rapid thermal process where a film is formed on a substrate according to an embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es