About: http://webisa.webdatacommons.org/336392150

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	connection film formed on the substrate except the trench for burying the wiring is removed by polishing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com