About: http://webisa.webdatacommons.org/336437498

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need for a high-throughput electron beam lithography system that is capable of providing variable size and shape electron beamlets that can be individually blanked.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com