About: http://webisa.webdatacommons.org/336570036

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	BACKGROUND OF THE INVENTION [0006] As integrated circuit transistor densities increase, and feature sizes shrink, capacitive coupling between adjacent interconnects, metal lines or other elements also increases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com