About: http://webisa.webdatacommons.org/336797426

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	against impurities such as moisture or an alkali metal can be obtained if it is formed in an atmosphere including nitride and argon by using a silicon target.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com