About: http://webisa.webdatacommons.org/337224217

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Protection of the dielectric coatings during release is required since materials such as silicon dioxide, titanium dioxide and tantalum pentoxide are etched by hydrofluoric acid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com