About: http://webisa.webdatacommons.org/337469698

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Between the channel region Ch and the source region S or the drain region D, an LDD region implanted with N-type impurities, such as phosphorus, at a relatively low concentration is left.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au