About: http://webisa.webdatacommons.org/337674345

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Description of the Related Art [0004] Chemical vapor deposition (CVD) is a widely-used process for forming solid materials, such as coatings or powders, from reactants in the vapor phase.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com