About: http://webisa.webdatacommons.org/337706584

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Besides, there is a case wherein metallic contaminant is included in sub-materials used in respective steps such as abrasive grains used in the grinding apparatus and polishing apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com