About: http://webisa.webdatacommons.org/337799240

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, conductive word lines 212 and body lines 214 are formed, such as by CVD depositing a refractory metal (e.g., tungsten) or other suitable material in respective trenches 221 and 222.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com